EURONS Town Meeting 2008
September 17 - 19, 2008 -
Information

Title:	Dr.
Family Name:	Kordyasz
First Name:	Andrzej
Gender:	male
E-Mail:	kordslcj.uw.edu.pl
Affiliation for Badge:	Warsaw University
Institute:	Heavy Ion Laboratory
Address (Street):	Pasteura 5a
Postal Code, City:	02-093 Warsaw
Country:	Poland
Phone:	+48 22 55 46 210
Fax:	+48 22 659 27 14
Young researcher with contribution:	No
Arrival Date:	September 14
Departure Date:	September 22
Author(s):	A. J. Kordyasz, G. Poggi,L. Bardelli, R. Bougault, L. Lavergne, M. Kowalczyk, J. Sarnecki, A. Brzozowski, T. Kozik, J. Mierzejewski, G. Jaworski
Institute(s):
Title:	Resistivity Distribution of Si wafer by C-V Measurement with Gravitationally Pressed Mercury Drop
Abstract:	We have elaborated a new version of Mercury Probe for C-V measurement distribution of large area Si wafers. The junction capacitance was evaluated by measurement of charge injected to the charge preamplifier through the polarysed Shotky junction created by mercury drop gtravitatinally pressed to the Si wafer. To get the C-V distribution the mercury drop was rolled by computer system through the tested Si wafer surface. The C-V and resistivity distributions in form of three dimensional histograms of medium and high resistivity silicon n ¿ type float zone Topsil wafers and high resistivity epitaxial n ¿ n+ structures produced by Warsaw Institute of Electronic Materials Technology were presented. For some wafers resistivity nonuniformity is larger than 50%.

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